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Semiconductor
AP Plasma
RF Module

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ÀúÈñ(ÁÖ)·¡µð¾ðÅ×Å©´Â ¹ÝµµÃ¼ Dry Etching¿ë Àåºñ¾÷ü·Î¼­, 4~6 inch ¿þÀÌÆÛ¿ë M7000 Dry Etch Series ¿Í Dual RF Frequency¿¡ ÀÇÇÑ °í¹Ðµµ ÇöóÁ¸¦ ÀÌ¿ëÇÑ 8 inch SHD Up-Grade Etcher¸¦ °í°´¿¡°Ô Á¦°øÇϰí ÀÖ½À´Ï´Ù.


 

    M7000 Dry Etcher Series
  • M7400 RIE Type
  • M7500 ICP Type
  •     NEOSTM ADF Oxide Etcher
  • Dual Frequency Plasma Type

  • °æ±âµµ È­¼º½Ã žÈÀ¾ ¹Ý¿ù¸® 347-52
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